Corrigendum

Corrigendum

Thin Solid Films, 185 (1990) 373 373 Corrigendum R. K. Schreiner, M. Deschler and H. J~rgensen, New aspects in modern production equipment for III-...

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Thin Solid Films, 185 (1990) 373

373

Corrigendum

R. K. Schreiner, M. Deschler and H. J~rgensen, New aspects in modern production equipment for III-V processes, Thin Solid Films, 174 (1989) 315-322. The list of authors and affiliations should read as follows: R. K. SCHREINER, M. DESCHLER AND H. JURGENSEN

A I X T R O N GmbH Jiilicher Strafle 336- 338, 5100 Aachen ( F.R.G.) K. GR~JTER, R. BECCARD AND A. SCHLEGEL

Institute Of Semiconductor Electronics, Aachen Technical University, D-5100 Aachen ( F.R.G.)